#G01C19/5719

Compliant Stops for MEMS Inertial Device Drive PLL Stability

A MEMS inertial sensor device, method of operation, and fabrication process are described with a MEMS inertial sensor, drive actuation unit, drive measurement unit, and PLL circuit coupled together in…

DRIVE·Jan 16·1 min read

G01C19/5719 NXP USA, Inc.

FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION

A dual-shell architecture and methods of fabrication of fused quartz resonators is disclosed. The architecture may include two encapsulated and concentric cavities using plasma-activated wafer bonding…

DRIVE·Apr 18·1 min read

G01C19/5719 The Regents of the University of California

THREE-AXIS ROTATION RATE SENSOR INCLUDING A SUBSTRATE AND A DOUBLE ROTOR

A three-axis rotation rate sensor including a substrate and a double rotor. The double rotor includes a first rotor and a second rotor which are elastically connected to one another via a first coupli…

DRIVE·Jul 21·1 min read

G01C19/5719 Robert Bosch GmbH

MEMS GYROSCOPE SELF-TEST USING A TECHNIQUE FOR DEFLECTION OF THE SENSING MOBILE MASS

A microelectromechanical system (MEMS) gyroscope sensor has a sensing mass and a quadrature error compensation control loop for applying a force to the sensing mass to cancel quadrature error. To dete…

DRIVE·Apr 28·1 min read

G01C19/5719 STMicroelectronics, Inc.

Method and structure of an integrated mems inertial sensor device using electrostatic quadrature-cancellation

An integrated MEMS inertial sensor device is described. The device includes a MEMS inertial sensor overlying a CMOS substrate. The MEMS inertial sensor includes a drive frame coupled to the surface re…

DRIVE·Dec 10·1 min read

G01C19/5719 MCUBE INC [US]

ON-CHIP RESONANT ACCELERATION AND PRESSURE SENSOR

An illustrative combination acceleration and pressure sensor apparatus that is configured to include a differential resonant pressure sensor and a differential resonant acceleration sensor on a single…

DRIVE·Feb 5·2 min read

G01C19/5719 HONEYWELL INT INC [US]

Angular Rate Sensor With Quadrature Error Compensation

An angular rate sensor (20) includes a drive mass (36) flexibly coupled to a substrate (22). A sense mass (42) is suspended above the substrate (22) is and flexibly connected to the drive mass (36) vi…

DRIVE·Jan 15·2 min read

G01C19/5719 FREESCALE SEMICONDUCTOR INC [US]

MEMS Gyroscopes with Reduced Errors

In comb drive vibratory gyroscopes, drive-induced Coriolis accelerometer offset is effectively canceled by demodulating the output during equal times of in-phase (+) and anti-phase (-) drive of the sh…

DRIVE·Oct 30·1 min read

G01C19/5719 ANALOG DEVICES INC [US]

INERTIA SENSOR

This invention is directed to provision of a high-performance inertial sensor that can sustain SNR even in an environment where vibration disturbance exists. A vibration type inertial sensor comprises…

DRIVE·May 15·2 min read

G01C19/5719 HITACHI AUTOMOTIVE SYSTEMS LTD [JP]

Micromachined gyroscope

A micromachined sensor with quadrature suppression comprising: a quadrature suppression electrode; and a resonator mass positioned adjacent to the quadrature suppression electrode, the resonator mass …

DRIVE·Jun 1·1 min read

G01C19/5719 ANALOG DEVICES INC [US]

Capacitive Sensor

A technique in which a false detection and a wrong diagnosis can be suppressed in a capacitance sensor represented by an acceleration sensor is provided. A first capacitative element and a second capa…

DRIVE·May 4·1 min read

G01C19/5719 HITACHI AUTOMOTIVE SYSTEMS LTD [JP]

Angular velocity detecting apparatus

An angular-velocity detecting apparatus including a synchronous-detection unit 39 for performing the synchronous detection of a displacement signal from a vibrator 4, a unit 43 for changing a voltage …

DRIVE·Apr 6·1 min read

G01C19/5719 HITACHI AUTOMOTIVE SYSTEMS LTD [JP]

Nonresonant micromachined gyroscopes with structural mode-decoupling

A four-degrees-of-freedom (DOF) nonresonant micromachined gyroscope utilizes a dynamical amplification both in the 2-DOF drive-direction oscillator and the 2-DOF sense-direction oscillator, which are …

DRIVE·Aug 31·1 min read

G01C19/5719 UNIV CALIFORNIA [US]

Angular-rate detecting apparatus

An Angular-rate detecting apparatus includes four mass portions connected by at least one support beam, and the mass portions have respective individual vibration generators disposed thereon. The indi…

DRIVE·Mar 30·1 min read

G01C19/5719 MURATA MANUFACTURING CO [JP]

Z-axis vibration gyroscope

An angular velocity sensor is disclosed having a sensing element and a pair of driven mass drive elements. The driven mass drive elements have a support structure which defines at least one vibrationa…

DRIVE·May 6·1 min read

G01C19/5719 MATSUSHITA ELECTRIC INDUSTRIAL CO LTD [JP]

Angular rate sensor

An angular rotation measuring apparatus and method is described. The apparatus comprises at least one dither frame formed of an upper sensor layer, the frame having a dither axis disposed parallel to …

DRIVE·Nov 5·1 min read

G01C19/5719 L 3 COMM CORP [US]

Capacitance-Type Angular Velocity Sensor

A capacitance-type external-force detecting device includes a substrate (2), a moveable unit (7) which is supported by the substrate (2) via a supporting beam (6) and which can be displaced in the det…

DRIVE·Dec 5·2 min read

G01C19/5719 MURATA MANUFACTURING CO [JP]

Vibrator

A vibrator (2) includes: a vibrating body (8); a driving unit (5,11) for causing the vibrating body (8) to vibrate in a predetermined vibrating direction; and a driving monitoring unit (6c,6f) for det…

DRIVE·Nov 7·1 min read

G01C19/5719 MURATA MANUFACTURING CO [JP]

Angular rate sensor

A conventional angular rate sensor has a problem that the displacement amplitude of a drive gimbal frame (102) is limited due to the Pulled-in phenomenon where the drive gimbal frame is attached to dr…

DRIVE·May 2·1 min read

G01C19/5719 MITSUBISHI ELECTRIC CORP [JP]