#MCUBE INC [US]

Method and structure of an integrated mems inertial sensor device using electrostatic quadrature-cancellation

An integrated MEMS inertial sensor device is described. The device includes a MEMS inertial sensor overlying a CMOS substrate. The MEMS inertial sensor includes a drive frame coupled to the surface re…

DRIVE·Dec 10·1 min read

G01C19/5719 MCUBE INC [US]

Multi-axis integrated MEMS inertial sensing device on single packaged chip

A multi-axis integrated MEMS inertial sensor device. The device can include an integrated 3-axis gyroscope and 3-axis accelerometer on a single chip, creating a 6-axis inertial sensor device. The stru…

DRIVE·Jul 30·1 min read

B81B7/0038 MCUBE INC [US]