Angular rate sensor

A conventional angular rate sensor has a problem that the displacement amplitude of a drive gimbal frame (102) is limited due to the Pulled-in phenomenon where the drive gimbal frame is attached to drive electrodes (106), thereby decreasing its sensor sensitivity. In an angular rate sensor, a drive frame (5) and a driven frame (2) are separately provided. A bending oscillation of the drive frame is transmitted to the driven frame through link beams (7), causing a rotational oscillation of the driven frame. The displacement amplitude of a rotational oscillation of the driven frame is not limited to provide high sensor sensitivity.