ON-CHIP RESONANT ACCELERATION AND PRESSURE SENSOR

An illustrative combination acceleration and pressure sensor apparatus that is configured to include a differential resonant pressure sensor and a differential resonant acceleration sensor on a single chip. The combination sensor apparatus may include a substrate having a sense diaphragm, a first single crystal resonator and a second single crystal resonator supported by the sense diaphragm, and a third single crystal resonator and a fourth single crystal resonator supported by the substrate and laterally spaced from the sense diaphragm. An inertial mass may be physically coupled to the third resonator and fourth resonator and be located between the third resonator and the fourth resonator. The resonators of the sensor apparatus may include double-ended tuning fork and vibrating gate transistors-that utilize MEMS/NEMS, MOSFET and/or SOI CMOSFET technologies. In some cases, the illustrative combination sensor apparatus may include a differential resonant pressure sensor, a differential resonant acceleration sensor and a differential resonant gyro sensor on a single chip.