QUADRATURE TRIM VERTICAL ELECTRODES FOR YAW AXIS CORIOLIS VIBRATORY GYROSCOPEMicroelectromechanical systems (MEMS) yaw gyroscopes having out-of-plane quadrature trim electrodes are described. The gyroscope includes a proof mass configured to be driven in-plane. The proof mass …DRIVE·Jun 25·1 min readFollowG01C19/5656ANALOG DEVICES INC [US]
FULLY DECOUPLED THREE-AXIS MEMS GYROSCOPEProvided is a fully decoupled MEMS gyroscope, including a base, a sensing unit elastically connected to the base, and a driving unit coupled with the sensing unit and driving the sensing unit to move.…DRIVE·May 1·2 min readFollowG01C19/5656AAC Kaitai Technologies (Wuhan) CO., LTD
SENSOR AND ELECTRONIC DEVICEAccording to one embodiment, a sensor includes a base, a first support portion fixed to the substrate, and a first member supported by the first support portion. A gap is provided between the base and…DRIVE·Nov 20·1 min readFollowG01C19/5656TOSHIBA KK [JP]
THREE-AXIS MEMS GYROSCOPEA three-axis microelectromechanical system (MEMS) gyroscope includes a first proof mass (M1, M2), a second proof mass (M7), a third proof mass (M3, M4), and a fourth proof mass (M5, M6), where the pro…DRIVE·Jul 10·2 min readFollowG01C19/5656SENODIA TECH SHAOXING CO LTD [CN]
SENSOR AND ELECTRONIC DEVICEAccording to one embodiment, a sensor includes a base, a first support portion fixed to the substrate, and a first member supported by the first support portion. A gap is provided between the base and…DRIVE·Mar 14·1 min readFollowG01C19/5656KABUSHIKI KAISHA TOSHIBA
MICROMECHANICAL SYSTEM, METHOD FOR OPERATING A MICROMECHANICAL SYSTEMA micromechanical system which includes a movably suspended mass. The micromechanical system includes a damping system, the damping system including a movably suspended damping structure, the damping …DRIVE·Feb 17·1 min readFollowG01C19/5656Robert Bosch GmbH
SENSOR DEVICE, GYRO SENSOR, AND ELECTRONIC APPARATUS[Object] To provide a sensor device, a gyro sensor, and an electronic apparatus capable of highly-accurately detecting angular velocities in multiaxial directions. [Solving Means] A sensor device acco…DRIVE·Jan 18·2 min readFollowG01C19/5656SONY CORPORATION
An arrangement for measuring angular velocityThe invention includes a sensor comprising a body (1) formed from a planar substrate. The body defines a beam (2), the opposed ends of which are adapted to be fixed in position, the beam having a pref…DRIVE·Oct 13·2 min readFollowG01C19/5656AUTOLIV DEV [SE]
Isolated resonator gyroscope with a drive and sense plateThe present invention discloses a resonator gyroscope comprising a vibrationally isolated resonator (124) including a proof mass (102), a counterbalancing plate (104) having an extensive planar region…DRIVE·Aug 25·1 min readFollowG01C19/5656BOEING CO [US]
Rotational micro-electromechanical (mems) structure with parallel electrodesA rotational micro-electro-mechanical structure includes a stator (21), having a plurality of stator electrodes (33, 34), and a rotor (23), which is rotatable with respect to the stator (21) about an …DRIVE·Aug 4·1 min readFollowG01C19/5656ST MICROELECTRONICS SRL [IT]
Vibrating gyroscopeA vibrating gyroscope includes a vibrator (22) having a plurality of piezoelectric members (24, 26) stacked and polarized in directions opposing each other; at least one drive electrode (32, 34) forme…DRIVE·May 9·1 min readFollowG01C19/5656MURATA MANUFACTURING CO [JP]
