MICROMECHANICAL SYSTEM, METHOD FOR OPERATING A MICROMECHANICAL SYSTEM
DRIVE
February 17, 2022
A micromechanical system which includes a movably suspended mass. The micromechanical system includes a damping system, the damping system including a movably suspended damping structure, the damping structure being deflectable by applying a voltage. The damping structure is designed in such a way that a frequency response and/or a damping of the movably suspended mass are/is changeable with the aid of a deflection of the damping structure.
Discussion in the ATmosphere