SENSOR DEVICE, GYRO SENSOR, AND ELECTRONIC APPARATUS

DRIVE January 18, 2018
Source
[Object] To provide a sensor device, a gyro sensor, and an electronic apparatus capable of highly-accurately detecting angular velocities in multiaxial directions. [Solving Means] A sensor device according to an embodiment of the present technology includes a vibrator unit, an annular base portion, a plurality of coupling portions, and a wiring layer. The wiring layer includes a plurality of drive wirings and a plurality of detection wirings. The plurality of drive wirings are respectively connected to first and second drive electrodes while being adjacent and parallel to one another. The plurality of detection wirings are respectively connected to first and second detection electrodes while being adjacent and parallel to one another. The wiring layer is provided at each of the plurality of coupling portions to electrically connect a plurality of terminal portions provided in the base portion with a plurality of piezoelectric drive units and first and second piezoelectric detection units provided in the vibrator unit.

Discussion in the ATmosphere

Loading comments...