SENSOR ELEMENT, PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND VEHICLE

DRIVE October 3, 2019
Source
A sensor element includes: a base portion; a drive arm coupled to the base portion via a coupling arm extending on a first axis from the base portion; a first detection arm extending from the base portion in a positive direction of a second axis orthogonal to the first axis and a second detection arm extending from the base portion in a negative direction of the second axis in the plan view; a drive signal wiring disposed on the base portion along the first axis in the plan view; and a first detection signal wiring and a second detection signal wiring disposed on the base portion in the plan view, in which shapes of the first detection signal wiring and the second detection signal wiring are different from each other in line symmetrical shapes based on the first axis in the plan view.

Discussion in the ATmosphere

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