SENSOR ELEMENT, INERTIAL SENSOR, AND ELECTRONIC APPARATUS

DRIVE August 29, 2019
Source
A sensor element according to an embodiment of the present technology includes a base portion, a movable portion, first and second bridge portions, and an acceleration detector unit. The movable portion is movable relative to the base portion by reception of an acceleration along at least a uniaxial direction. The first bridge portion includes a first beam and a first structure, the first beam extending in a first axis direction parallel to a main surface of the base portion and connecting the base portion and the movable portion, the first structure being provided between the first beam and the base portion and supporting the first beam. The second bridge portion includes a second beam and a second structure, the second beam extending in a second axis direction orthogonal to the first axis and parallel to the main surface and connecting the base portion and the movable portion, the second structure being provided between the second beam and the base portion and supporting the second beam. The acceleration detector unit is disposed on each of the first beam and the second beam and outputs a first detection signal corresponding to an amount of deformation of each of the first beam and the second beam.

Discussion in the ATmosphere

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