PHYSICAL QUANTITY SENSOR, METHOD OF MANUFACTURING PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND VEHICLE
DRIVE
October 3, 2019
A physical quantity sensor includes: a supporting member; and a sensor element supported by the supporting member, in which the sensor element includes a vibrator element, a drive signal wiring disposed on the vibrator element, and a first detection signal terminal and a second detection signal terminal disposed on the vibrator element, the supporting member includes a substrate on which the sensor element is joined, and a first detection signal wiring and a second detection signal wiring disposed on the substrate, and the first detection signal wiring and the second detection signal wiring respectively include areas that extend along a second axis intersecting with the first axis and that intersect with the drive signal wiring in a plan view as seen in a direction in which the sensor element and the substrate overlap with each other.
Discussion in the ATmosphere