SENSOR ELEMENT AND ANGULAR VELOCITY SENSOR
DRIVE
September 13, 2023
In a sensor element, a frame has an x-axis direction as a longitudinal direction. Two driving arms extend from the frame alongside each other in a y-axis direction. A detecting arm extends from the frame in the y-axis direction at a position which is a center of the two driving arms in the x-axis direction. A plurality of excitation-use wiring parts connect a plurality of excitation electrodes and terminals with connection relationships where the two driving arms vibrate with inverse phases in the x-axis direction. A first detection-use wiring part is connected to a first detecting electrode and a first detection-use terminal. A second detection-use wiring part is connected to a second detecting electrode and a second detection-use terminal. At least a portion of the first detection-use wiring part and at least a portion of the second detection-use wiring part extend alongside each other on the frame over 1/4 or more of a length of the frame in the longitudinal direction of the frame.
Discussion in the ATmosphere