MEMS-SensorA sensor for measuring physical parameters such as acceleration, rotation, magnetic field, comprises a substrate (13) defining a substrate plane and at least one sensing plate (11, 12) suspended above…DRIVE·Dec 3·2 min readFollowB81B3/0021TRONICS MICROSYSTEMS S A [FR]
Micromechanical gyroscopeA micromechanical sensor device for measuring angular z-axis motion comprises two vibratory structures (2.1, 2.2, 7.1, 7.2) each having at least one proof mass (2.1, 2.2). A suspension structure (3.1,…DRIVE·Jun 25·2 min readFollowG01C19/5747TRONICS MICROSYSTEMS S A [FR]
A micro-electromechanical gyro deviceA resonator micro-electronic gyro, preferably a micro-electromechanical system (MEMS) gyro comprises a first and a second resonator mass (1, 2) suspended for rotational vibration. The two masses (1, 2…DRIVE·Mar 27·2 min readFollowG01C19/5712TRONICS MICROSYSTEMS S A [FR]
