A CAPACITIVE LINEARIZATION METHOD APPLIED TO MEMS MICROPHONES SYSTEMSA microphone includes a microelectromechanical system (MEMS) device responsive to sound waves or vibrations having an output coupled to a first node; a programmable gain amplifier or source follower h…DRIVE·Apr 22·1 min readFollowB81B3/0021INFINEON TECHNOLOGIES AG [DE]
Capacitive Linearization Method Applied to MEMS Microphones SystemsA microphone includes a microelectromechanical system (MEMS) device responsive to sound waves or vibrations having an output coupled to a first node; a programmable gain amplifier or source follower h…DRIVE·Dec 14·1 min readFollowB81B3/0021InfineonTechnologies AG
METHOD FOR OPERATING A CAPACITIVE MEMS SENSOR, AND CAPACITIVE MEMS SENSORA method for operating a capacitive MEMS sensor. The method includes: supplying a defined electrical potential on a deflectably mounted, seismic mass of the MEMS sensor; capacitively inducing a vibrat…DRIVE·Jan 27·1 min readFollowB81B3/0021Robert Bosch GmbH
MEMS-SensorA sensor for measuring physical parameters such as acceleration, rotation, magnetic field, comprises a substrate (13) defining a substrate plane and at least one sensing plate (11, 12) suspended above…DRIVE·Dec 3·2 min readFollowB81B3/0021TRONICS MICROSYSTEMS S A [FR]
