#G01C9/02

SUBSTRATE TYPE SENSOR FOR MEASURING HORIZONTALITY OF SUBSTRATE SUPPORT MEMBER PROVIDED IN ATMOSPHERE ACCOMPANIED BY TEMPERATURE CHANGE, METHOD FOR MEASURING HORIZONTALITY OF SUBSTRATE SUPPORT MEMBER BY USING THE SAME, AND NON-TRANSITORY COMPUTER READABLE MEDIUM

A substrate type sensor provided in an atmosphere accompanied by a temperature change to measure a horizontality of a support member that supports a substrate is disclosed. The substrate type sensor m…