#B81B3/0051

MICROELECTROMECHANICAL DEVICE WITH MOVABLE MASS AND STOPPER MECHANISM

Microelectromechanical device (1) comprising a supporting body (2), containing semiconductor material and a movable mass (3), constrained to the supporting body with a relative degree of freedom with …

DRIVE·Feb 25·1 min read

B81B3/0051 ST MICROELECTRONICS INT NV [CH]

MICROELECTROMECHANICAL DEVICE WITH OUT-OF-PLANE STOPPER STRUCTURE AND PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL DEVICE

A microelectromechanical device includes a substrate (21), a first structural layer (23), and a second structural layer (25) of semiconductor material. A sensing mass (32; 132) extends in the first st…

DRIVE·Jul 9·2 min read

B81B3/0051 ST MICROELECTRONICS SRL [IT]

Inertial sensor

An inertial sensor includes a sensing portion (10) having a weight (12) supported by beams (13), the weight (12) being a movable portion, and a weight stopper (16) that limits a movable range of the w…

DRIVE·Oct 5·1 min read

B81B3/0051 FUJITSU MEDIA DEVICES LTD [JP]