#B81B3/00

Oscillating micro-mechanical sensor of angular velocity

The present invention relates to measuring devices used in measuring angular velocity and, more specifically, to oscillating micro-mechanical sensors of angular velocity. In the sensors of angular vel…

DRIVE·Oct 23·1 min read

B81B3/00 MURATA ELECTRONICS OY [FI]

Method for producing a structure having a buried electrode by direct transfer

The device has a lower substrate (100) including a lower electrode (102) and a dielectric layer (103). An intermediate substrate (200) made of single-crystal silicon and extending along a main plane i…

DRIVE·Jan 16·1 min read

B81B3/00 COMMISSARIAT ENERGIE ATOMIQUE [FR]

Method of making a MEMS device

A method of forming a MEMS device (10) includes forming a sacrificial layer (34) over a substrate (12). The method further includes forming a metal layer (42) over the sacrificial layer (34) and formi…

DRIVE·Jul 18·1 min read

B81B3/00 FREESCALE SEMICONDUCTOR INC [US]

ANGULAR VELOCITY SENSOR, ELECTRONIC DEVICE, AND METHOD FOR DETECTING ANGULAR VELOCITY

[Object] To provide an angular velocity sensor, an electronic apparatus, and a method of detecting an angular velocity, which allow high-accuracy detection of an angular velocity about an axis in a th…

DRIVE·Dec 7·2 min read

B81B3/00 SONY CORP [JP]