ANGULAR VELOCITY SENSOR, ELECTRONIC DEVICE, AND METHOD FOR DETECTING ANGULAR VELOCITY

[Object] To provide an angular velocity sensor, an electronic apparatus, and a method of detecting an angular velocity, which allow high-accuracy detection of an angular velocity about an axis in a thickness direction within a plane. [0002] [Solving Means] An angular velocity sensor in one embodiment of the present invention includes an annular frame (10), a drive part, and a detection part. The frame has a first set of beams (11a, 11b) and a second set of beams (12a, 12b). The first set of beams extends in an a-axis direction and is opposed to each other in a b-axis direction orthogonal to the a-axis direction. The second set of beams extends in the b-axis direction and is opposed to each other in the a-axis direction. The drive part causes the frame to oscillate within an XY plane to which the a-axis and the b-axis belong, in an oscillation mode where, when one of the first and second sets of beams comes closer to each other, the other set separates from each other. The detection part detects an angular velocity around an axis in the Z-axis direction orthogonal to the XY plane, on the basis of an amount of deformation of the frame oscillating in the oscillation mode within the XY plane.