PROCESS FOR MANUFACTURING A SOLID ELECTROLYTE FOR AN ELECTROCHEMICAL DEVICE

A method for manufacturing a solid electrolyte, including: (a) disposing a substrate in the reaction chamber of an atomic thin film deposition reactor; (b) providing a pulse of a first chemical precursor in the reaction chamber; (c) purging the reaction chamber; (d) providing a pulse of a second chemical precursor in the reaction chamber; (e) purging the reaction chamber; (f) repeating steps (d) and (e) with another chemical precursor; (g) repeating steps (b) to (e) or, when step (f) is performed, steps (b) to (f), until a desired thickness of the solid electrolyte is obtained. The manufacturing process further comprises a step (h) consisting in providing a pulse of an inert gas for a determined time in the reaction chamber.