METHOD FOR MANUFACTURING AN INTERFACIAL LITHIUM FLUORIDE LAYER FOR AN ELECTROCHEMICAL CELL

A method for manufacturing an interfacial lithium fluoride layer for an electrochemical cell that cycles lithium ions is disclosed. In the method, a substrate is positioned in a reaction chamber of an atomic layer deposition reactor and a lithium fluoride (LiF) precursor is introduced into the reaction chamber such that the LiF precursor contacts and chemically reacts with functional groups on the substrate. Then, an oxidant is introduced into the reaction chamber to form a single molecular layer of lithium fluoride on the substrate. The lithium fluoride layer is formed on the substrate at a temperature of greater than or equal to about 110 degrees Celsius to less than or equal to about 250 degrees Celsius.