SENSOR ELEMENT, ANGULAR VELOCITY SENSOR, AND MULTI-AXIS ANGULAR VELOCITY SENSOR

DRIVE December 12, 2019
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A sensor element includes a piezoelectric body, a plurality of excitation electrodes, and a plurality of detecting electrodes. The piezoelectric body includes a frame and a driving arm and detecting arm which extend from the frame within a predetermined plane parallel to an xy plane in an orthogonal coordinate system xyz. The plurality of excitation electrodes are located on the driving arm. The plurality of detecting electrodes are located on the detecting arm in an arrangement enabling detection of a signal generated by bending deformation of the detecting arm in a z-axis direction. The detecting arm includes a first arm and second arm. The first arm extends from the frame in the predetermined plane. The second arm is connected to a front end side portion of the first arm and extend from a front end side of the first arm toward a frame side within the predetermined plane. An end part of the second arm on the frame side is formed as a free end.

Discussion in the ATmosphere

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