ANGULAR VELOCITY SENSOR, SENSOR ELEMENT, AND MULTI-AXIS ANGULAR VELOCITY SENSOR

An angular velocity sensor includes a piezoelectric body, a drive circuit, and a detection circuit. The piezoelectric body includes a frame, a pair of drive arms, and a detection arm. The frame is supported in a pair of supported parts which are spaced apart from each other in an x-axis direction. The pair of drive arms extend alongside each other from the frame in a y-axis direction between the pair of supported parts and spaced apart from each other in the x-axis direction. The detection arm extends from the frame in the y-axis direction and is between the pair of drive arms in the x-axis direction. The drive circuit applies voltages of mutually reverse phases to the pair of drive arms so that the drive arms vibrate bending toward mutually reverse sides in the x-axis direction. The detection circuit detects signals generated due to bending deformation of the detection arm.