MICROELECTROMECHANICAL GYROSCOPE HAVING A RESONANT DRIVING LOOP WITH CONTROLLED OSCILLATION AMPLITUDE AND METHOD OF CONTROLLING A MICROELECTROMECHANICAL GYROSCOPE
DRIVE
July 31, 2024
A microelectromechanical gyroscope includes: a support structure (6); a driving mass (7) movable according to a driving axis (X); and an oscillating microelectromechanical loop (10), having a resonance frequency (f) and a loop gain (GLOOP) and including the driving mass (7), a sensing interface (12), which senses a position of the driving mass (7), and a gain control stage (18), which maintains a modulus of the loop gain (G) at a unitary value at the resonance frequency (f). The gain control stage (18) includes a sampler (20) and an transconductance operational amplifier (21) in an open-loop configuration. The sampler (20) acquires samples (V*) of a loop signal (V) from the sensing interface (12) in a first operative condition and transfers them to the transconductance operational amplifier (21) in a second operative condition. The sampler (20) decouples the transconductance operational amplifier (21) from the sensing interface (12) in the first operative condition and in the second operative condition.
Discussion in the ATmosphere