MICROELECTROMECHANICAL GYROSCOPE HAVING A RESONANT DRIVING LOOP WITH CONTROLLED OSCILLATION AMPLITUDE AND METHOD OF CONTROLLING A MICROELECTROMECHANICAL GYROSCOPE
DRIVE
December 29, 2022
A microelectromechanical gyroscope includes a support structure, a driving mass movable according to a driving axis; and an oscillating microelectromechanical loop. The microelectromechanical loop has a resonance frequency and a loop gain and includes the driving mass, a sensing interface that senses a position of the driving mass, and a gain control stage that maintains a modulus of the loop gain at a unitary value at the resonance frequency. The gain control stage includes a sampler and an transconductance operational amplifier in an open-loop configuration. The sampler acquires samples of a loop signal from the sensing interface in a first operative condition and transfers them to the transconductance operational amplifier in a second operative condition. The sampler decouples the transconductance operational amplifier from the sensing interface in the first operative condition and in the second operative condition.
Discussion in the ATmosphere