Microelectromechanical gyroscope with calibrated synchronization of actuation and method for actuating a microelectromechanical gyroscope

DRIVE August 24, 2011
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A gyroscope includes a body (6), a driving mass (7), which is mobile according to a driving axis (X), and a sensing mass (8), which is driven by the driving mass (7) and is mobile according to a sensing axis (Y), in response to rotations of the body (6). A driving device (3) forms a microelectromechanical control loop (18) with the body (6) and the driving mass (7) and maintains the driving mass (7) in oscillation with a driving frequency (É D ). The driving device (3) comprises a frequency detector (25), which supplies a clock signal (CK N ) at the frequency of oscillation of the driving mass (7), and a synchronization stage (29), which applies a calibrated phase shift (Õ) to the clock signal (CK N ) so as to compensate a phase shift caused by components (20, 21, 22) of the loop (18) that are set between the driving mass (7) and the control node (25a).

Discussion in the ATmosphere

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