INERTIAL NAVIGATION SENSOR WITH REDUCED FOOTPRINT

DRIVE December 14, 2023
Source
The invention relates to an inertial sensor () comprising a substrate extending along a drive excitation direction (x) and a detection direction (y) normal to each other, the device plane being perpendicular to a rotation direction (z), a first drive frame () and a second drive frame (), a first sense frame (), a second sense frame (), a sense lever () pivotably mounted around a rotation axis (), a sensing system comprising a strain gauge () mechanically stressed by the sense lever it is rotating around the rotation axis. The sense lever includes a central portion (), a first arm () and a second arm (), the central portion having a dimension along the detection direction called central width, the arms having a dimension along the detection direction called arm width, the central width being at least twice greater than the arm width.

Discussion in the ATmosphere

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