INERTIAL SENSOR ARCHITECTURE WITH BALANCED SENSE MODE AND IMPROVED IMMUNITY TO QUADRATURE EFFECTS

The invention relates to an inertial sensor (1) comprising a substrate (2), sense frames (210, 220), drive frames (110, 120) configured to put into motion the sense frames, and a sense lever (300) pivotably mounted around a rotation axis (7). The sense frames, drive frames and sense lever are connected to each other by elastically means in such a way that when the inertial sensor is subjected to a rotational movement around the rotation axis, the first sense frame, the second sense frame and the sense lever respectively feature a first tilt θ1 a second tilt θ2 and a lever tilt θS relatively to the device plane, and both θ1/θS and θ2/θS are lower than 0.1. The inertial sensor features strain gauges that get stressed when the lever rotates due to the motion of the sense frames.