INERTIAL SENSOR, ELECTRONIC DEVICE, AND VEHICLE

DRIVE May 28, 2020
Source
An inertial sensor includes a substrate, a first detection movable body and a second detection movable body which overlap the substrate in a direction along the Z-axis and are disposed side by side in a direction along the X-axis, a first detection spring that supports the first detection movable body to be displaceable in the direction along the X-axis, a second detection spring that supports the second detection movable body to be displaceable in the direction along the X-axis, a first drive portion that drives the first detection movable body with a drive component in the direction along the X-axis, a second drive portion that drives the second detection movable body with the drive component in the direction along the X-axis, and a first and second fixed detection electrodes disposed on the substrate and facing the first and second detection movable bodies. The first and second detection springs are provided with a first thin portion thinner than a thickness of the first and second detection movable bodies in the direction along the Z-axis.

Discussion in the ATmosphere

Loading comments...