MEMS DEVICE

Disclosed is a MEMS device, comprising: a movable electrode plate; a first electrode plate and a first feedback electrode plate located on a first side of the movable electrode plate; a second electrode plate and a second feedback electrode plate located on a second side of the movable electrode plate. The first electrode plate, the first feedback electrode plate, the second electrode plate, the second feedback electrode plate respectively form a first capacitor, a first feedback capacitor, a second capacitor and a second feedback capacitor with the movable electrode plate. The first and the second capacitors are coupled to a detection circuit for performing differential detection on the first and the second capacitors; the first feedback capacitor and the second feedback capacitor are coupled to a feedback circuit for eliminating nonlinear relationship between an output voltage of the detection circuit and a displacement of the movable electrode plate.