{
  "$type": "site.standard.document",
  "description": "Disclosed is a MEMS device, comprising: a movable electrode plate; a first electrode plate and a first feedback electrode plate located on a first side of the movable electrode plate; a second electrode plate and a second feedback electrode plate located on a second side of the movable electrode…",
  "path": "/patents/1358242",
  "publishedAt": "2024-01-25T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "B81B7/008",
    "Zhunmao (Hangzhou) Technology Co."
  ],
  "textContent": "Disclosed is a MEMS device, comprising: a movable electrode plate; a first electrode plate and a first feedback electrode plate located on a first side of the movable electrode plate; a second electrode plate and a second feedback electrode plate located on a second side of the movable electrode plate. The first electrode plate, the first feedback electrode plate, the second electrode plate, the second feedback electrode plate respectively form a first capacitor, a first feedback capacitor, a second capacitor and a second feedback capacitor with the movable electrode plate. The first and the second capacitors are coupled to a detection circuit for performing differential detection on the first and the second capacitors; the first feedback capacitor and the second feedback capacitor are coupled to a feedback circuit for eliminating nonlinear relationship between an output voltage of the detection circuit and a displacement of the movable electrode plate.",
  "title": "MEMS DEVICE"
}