IN-PLANE DISPLACEMENT DETECTION STRUCTURE AND ACCELEROMETER
DRIVE
December 18, 2025
An in-plane displacement detection structure and an accelerometer are provided. The in-plane displacement detection structure includes a substrate, a detection assembly disposed on the substrate, and electrode wires. The detection assembly includes two first detection assemblies. The two first detection assemblies are centrosymmetric with each other. Each of the first detection assemblies includes a first movable plate, a first fixed plate, a second fixed plate, and a second movable plate that are sequentially disposed at intervals. Each second fixed plate and each second movable plate are stepped. Two second movable plates thereof are adjacent to each other. Each of the electrode wires is electrically connected to first electrode anchor points and second electrode anchor points of the detection assembly. In the in-plane displacement detection structure, a space occupied by fixed plates and movable plates is reduced to make it suitable for a miniaturized design of the accelerometer.
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