On-chip resonant gyro and pressure sensor

An illustrative combination sensor apparatus that is configured to include a resonant differential pressure sensor and a resonant differential gyro sensor on a single chip. The combination sensor apparatus may include a substrate having a sense diaphragm, a first resonator and a second resonator supported by the sense diaphragm, and a third resonator and a fourth resonator supported by the substrate and laterally spaced from the sense diaphragm. The resonators of the sensor apparatus may include double-ended tuning fork and vibrating gate MOSFET transistors that utilize MEMS/NEMS, MOSFET and/or SOI CMOSFET technologies.