{
  "$type": "site.standard.document",
  "description": "An illustrative combination sensor apparatus that is configured to include a resonant differential pressure sensor and a resonant differential gyro sensor on a single chip. The combination sensor apparatus may include a substrate having a sense diaphragm, a first resonator and a second resonator…",
  "path": "/patents/978795",
  "publishedAt": "2014-02-05T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C19/574",
    "HONEYWELL INT INC [US]"
  ],
  "textContent": "An illustrative combination sensor apparatus that is configured to include a resonant differential pressure sensor and a resonant differential gyro sensor on a single chip. The combination sensor apparatus may include a substrate having a sense diaphragm, a first resonator and a second resonator supported by the sense diaphragm, and a third resonator and a fourth resonator supported by the substrate and laterally spaced from the sense diaphragm. The resonators of the sensor apparatus may include double-ended tuning fork and vibrating gate MOSFET transistors that utilize MEMS/NEMS, MOSFET and/or SOI CMOSFET technologies.",
  "title": "On-chip resonant gyro and pressure sensor"
}