Inertial rotation sensor with its sensitive element mounted directly on the body

DRIVE February 23, 2005
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The sensor has a resonator mounted on a body (10) and fixed opposite to electrodes. The resonator and an electrode carrier base (3) have thermal dilation coefficients that are close to each other. The body is made of a material having a thermal dilation coefficient close to that of the base. The base is directly fixed on the body. Connection pads (8, 9) extend on opposite sides of the base.

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