Inertial rotation sensor with its sensitive element mounted directly on the body
DRIVE
February 23, 2005
The sensor has a resonator mounted on a body (10) and fixed opposite to electrodes. The resonator and an electrode carrier base (3) have thermal dilation coefficients that are close to each other. The body is made of a material having a thermal dilation coefficient close to that of the base. The base is directly fixed on the body. Connection pads (8, 9) extend on opposite sides of the base.
Discussion in the ATmosphere