GYROSCOPE STRUCTUREThe present invention provides a gyroscope structure. A frame disposed on a substrate, and a flexible element is correspondingly disposed a first, second, and third plate. The first plate has a second…DRIVE·Jan 27·1 min readFollowG01C19/5663SENSORTEK TECHNOLOGY CORP.
MICROELECTROMECHANICAL SYSTEMS GYROSCOPEThe invention related to a microelectromechanical systems gyroscope, which comprises a plurality of sensing modules sensing angular velocities on tri-axes, a plurality of outer frames set at outside o…DRIVE·Mar 25·1 min readFollowG01C19/5712SENSORTEK TECHNOLOGY CORP.
