SYSTEM AND METHOD FOR MEASURING MAGNETIC FIELDS IN PVD SYSTEMA semiconductor processing system includes a first semiconductor processing site and a second semiconductor processing site. The system includes an unmanned electric vehicle configured to carry a port…DRIVE·Dec 7·1 min readFollowH01L21/67724Taiwan Semiconductor Manufacturing Co., Ltd.
TRANSPORT APPARATUSA transport apparatus includes a transport rail extending along a predetermined path, a transport vehicle configured to be movable along the transport rail to transport a material, and a brake unit mo…DRIVE·May 26·1 min readFollowH01L21/67724SEMES CO., LTD.
APPARATUS AND METHOD FOR MANAGING POWER OF ARTICLE TRANSPORT VEHICLE IN ARTICLE TRANSPORT SYSTEMAn apparatus for managing power of an article transport vehicle in an article transport system according to an embodiment of the present disclosure includes: a power receiving unit configured to recei…DRIVE·Feb 3·2 min readFollowH01L21/67724SEMES CO., LTD.
