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STRUCTURES FOR INTEGRATED SILICON PHOTONICS OPTICAL GYROSCOPES

Disclosed herein are configurations and methods to produce very low loss waveguide structures, which can be single-layer or multi-layer. These waveguide structures can be used as a sensing component o…

DRIVE·Aug 24·1 min read

G02B6/136 Anello Photonics, Inc.

PROCESS FLOW WITH PRE-BIASED MASK AND WET ETCHING FOR SMOOTH SIDEWALLS IN SILICON NITRIDE WAVEGUIDES

Aspects of the present disclosure are directed to process flow to fabricate a waveguide structure with a silicon nitride core having atomic-level smooth sidewalls achieved by wet etching instead of th…

DRIVE·Apr 20·1 min read

G02B6/136 Anello Photonics, Inc.

STRUCTURES FOR INTEGRATED SILICON PHOTONICS OPTICAL GYROSCOPES WITH STRUCTURAL MODIFICATIONS AT WAVEGUIDE CROSSING

Disclosed herein are configurations and methods to produce very low loss waveguide structures, which can be single-layer or multi-layer. These waveguide structures can be used as a sensing component o…

DRIVE·Mar 31·1 min read

G02B6/136 Anello Photonics, Inc.

SINGLE-LAYER AND MULTI-LAYER STRUCTURES FOR INTEGRATED SILICON PHOTONICS OPTICAL GYROSCOPES

Disclosed herein are configurations and methods to produce very low loss waveguide structures, which can be single-layer or multi-layer. These waveguide structures can be used as a sensing component o…

DRIVE·Sep 9·1 min read

G02B6/136 Anello Photonics, Inc.

#G02B6/136

STRUCTURES FOR INTEGRATED SILICON PHOTONICS OPTICAL GYROSCOPES

PROCESS FLOW WITH PRE-BIASED MASK AND WET ETCHING FOR SMOOTH SIDEWALLS IN SILICON NITRIDE WAVEGUIDES

STRUCTURES FOR INTEGRATED SILICON PHOTONICS OPTICAL GYROSCOPES WITH STRUCTURAL MODIFICATIONS AT WAVEGUIDE CROSSING

SINGLE-LAYER AND MULTI-LAYER STRUCTURES FOR INTEGRATED SILICON PHOTONICS OPTICAL GYROSCOPES