SENSOR AND ELECTRONIC DEVICEAccording to one embodiment, a sensor includes a base body including a first face, a first support portion, a first movable portion, and a first insulating member. The first face includes a first base…DRIVE·Jan 18·2 min readFollowG01C19/5769KABUSHIKI KAISHA TOSHIBA
MICRO HEMISPHERICAL RESONATOR GYROSCOPE, AND AN ASSEMBLY METHOD AND WAFER FIXTUREA wafer-level assembly method for a micro hemispherical resonator gyroscope includes: after independently manufactured glass substrates are softened and deformed at a high temperature, forming a micro…DRIVE·Feb 17·1 min readFollowG01C19/5769NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY
MECHANISM FOR SELECTIVE COUPLING IN MICROELECTROMECHANICAL SYSTEMS INERTIAL SENSORSCouplers for selectively coupling in-plane and out-of-plane motion between moving masses are provided herein. In particular, aspects of the present application provide for a coupler configured to coup…DRIVE·Dec 23·1 min readFollowG01C19/5769Analog Devices, Inc.
Micro-electro-mechanical structure having electrically insulated regions and manufacturing process thereofMicro-electro-mechanical structure formed by a substrate (41) of semiconductor material and a suspended mass (10, 20) extending above the substrate (41) and separated therefrom by an air gap (55). An …DRIVE·Jan 18·1 min readFollowG01C19/5769ST MICROELECTRONICS SRL [IT]
