INERTIAL SENSOR AND METHOD FOR FORMING THE SAMEAn inertial sensor and a method therefor. The inertial sensor includes: a first substrate; a medium layer stacked on the first substrate; a first electric-conductive layer stacked on the medium layer,…DRIVE·Dec 19·2 min readFollowG01C21/16AAC Technologies Pte. Ltd.
MEMS DEVICE AND MANUFACTURING METHOD THEREOFA MEMS device and a method for manufacturing the MEMS device are provided. The MEMS device includes a cap sheet and a device sheet. The device sheet includes a silicon substrate, at least two device s…DRIVE·Oct 10·2 min readFollowB81B3/0037AAC Technologies Pte. Ltd.
