VIBRATOR DEVICE, METHOD OF MANUFACTURING VIBRATOR DEVICE, ELECTRONIC APPARATUS, AND VEHICLE

DRIVE June 27, 2019
Source
A vibrator device includes a base, a first relay substrate mounted on the base, a second relay substrate mounted on the first relay substrate, and a vibrator element mounted on the second relay substrate, in which the second relay substrate is disposed between the first relay substrate and the vibrator, and the second relay substrate includes a terminal that is electrically coupled to the vibrator element and is positioned in a region overlapping with the first relay substrate and not overlapping the vibrator element in a plan view.

Discussion in the ATmosphere

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