INERTIAL MEASUREMENT APPARATUS, ELECTRONIC INSTRUMENT, AND MOVING OBJECT
DRIVE
April 29, 2021
An inertial measurement apparatus includes a first gyro sensor that has a detection axis set in the direction of a first axis, is driven at a first drive frequency, and detects angular velocity around the first axis, a second gyro sensor that has a detection axis set in the direction of a second axis, is driven at a second drive frequency, and detects angular velocity around the second axis, a third gyro sensor that has a detection axis set in the direction of a third axis, is driven at a third drive frequency, and detects angular velocity around the third axis, and a substrate on which the first, second, and third gyro sensors are provided. The natural vibration frequency of the substrate is set at a frequency that does not coincide with any of fd, fd, and fd, where fd, fd, and fd represent the first, second, and third drive frequencies.
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