Physical Quantity Sensor, Composite Sensor, Inertial Measurement Unit, Portable Electronic Apparatus, Electronic Apparatus, And Vehicle
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November 4, 2021
A gyro sensor includes: a spring having an inner span beam connected to an outer span beam via a turnaround beam; and a fixed driver that laterally faces the outer beam. A first beam is provided to the structure side of the outer beam so as to face the outer beam. T is a width of a space between the outer beam and the structure, T is a width of a space between the inner and outer beams, and T
Discussion in the ATmosphere