Physical Quantity Sensor, Composite Sensor, Inertial Measurement Unit, Portable Electronic Apparatus, Electronic Apparatus, And Vehicle

DRIVE August 3, 2023
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A gyro sensor includes: a spring having an inner span beam connected to an outer span beam via a turnaround beam; and a fixed driver that laterally faces the outer beam. A first beam is provided to the structure side of the outer beam so as to face the outer beam. T1 is a width of a space between the outer beam and the structure, T2 is a width of a space between the inner and outer beams, and T2

Discussion in the ATmosphere

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