PHYSICAL QUANTITY MEASUREMENT DEVICE

DRIVE December 23, 2021
Source
Provided is a physical quantity measurement device capable of preventing a sealing of a cavity portion on a back surface side of a diaphragm of a thermal air flow rate sensor while improving measurement accuracy of the thermal air flow rate sensor as compared with the related art. A physical quantity measurement device includes a lead frame having a mounting surface f on which a flow rate sensor which is the thermal air flow rate sensor is mounted, and a flow passage forming member disposed on a back surface f opposite to the mounting surface f of the lead frame . A ventilation flow path is formed by a first through hole provided in the lead frame and communicating with a cavity portion of the flow rate sensor a second through hole provided in the lead frame and opened in the mounting surface f and a connection flow path that is defined between the lead frame and the flow passage forming member and connecting the first through hole and the second through hole

Discussion in the ATmosphere

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