AIRFLOW MEASURING APPARATUS
DRIVE
October 15, 2014
Provided is an airflow measuring apparatus with good measurement accuracy. An airflow measuring apparatus includes: a sub-passage that takes in a part of a flow of fluid flowing through an intake pipe; a sensor element that is disposed in the sub-passage to measure the flow of fluid; a circuit part that converts the flow of fluid detected by the sensor element into an electric signal; a connector part having a connector that is electrically connected to the circuit part to output a signal externally; and a casing that supports the sensor element and the circuit part, the sensor element being disposed in the intake pipe. The sensor element includes a cavity that is disposed at a semiconductor substrate, and a diaphragm including a thin film part that covers the cavity. The sensor element is mounted at a lead frame. The sensor element and the lead frame have surfaces that are mold-packaged with resin so that a diaphragm part of the sensor element and a part of the lead frame are exposed. At least one hole is disposed at the lead frame for communication between the cavity and exterior of the mold package.
Discussion in the ATmosphere