DIE COATER INSPECTING DEVICE AND METHOD

DRIVE February 12, 2025
Source
A die coater inspection device for inspecting a die coater including a first die, a second die, and a shim formed between the first die and the second die according to an embodiment of the present invention for achieving the above object includes: a sensor module moving in a thickness direction of the die coater and configured to inspect a lip or the shim of the die coater; a control part configured to control an operation of the sensor module; and a storage part in which reference data on the thickness of the lip or the shim is stored, wherein the sensor module includes: a position detection sensor configured to detect a position of the lip; and a distance detection sensor configured to measure a height of the lip or the shim, and the control part includes: a first encoder configured to recognize a coordinate value of the sensor module whenever the sensor module moves in the thickness direction of the die coater; a reception part configured to receive a signal transmitted by the position detection sensor; a determination part configured to determine the position of the lip or the shim according to the signal received by the reception part; and a calculation part configured to perform calculation based on the position of the lip or the shim and the coordinate value so as to derive a coordinate value of the lip or a coordinate value of the shim.

Discussion in the ATmosphere

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