MICROELECTROMECHANICAL DEVICE
DRIVE
July 16, 2025
Microelectromechanical device (1) comprising: a frame; a test mass (4) connected to the frame by a first mechanical link that allows pivoting of the test mass relative to the frame about a first rotation axis (Δ) parallel to a mean plane of the frame; and a detection lever (7) for detecting a pivoting of the mass, connected to the test mass by a second mechanical link (9) allowing rotation of the lever (7) relative to the test mass (4) about a second axis (Δ). The second link comprises two walls connecting perpendicularly to one another and connecting, for one (91), to the lever, and for the other (97) to the test mass, one of the walls being parallel to the second rotation axis.
Discussion in the ATmosphere