MICROELECTROMECHANICAL GYROSCOPE WITH OUT-OF-PLANE DETECTION MOVEMENT HAVING IMPROVED ELECTRICAL CHARACTERISTICS

DRIVE September 10, 2025
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A microelectromechanical gyroscope (10) is provided with a detection structure (11) having: a substrate (14) with a top surface (14a) parallel to a horizontal plane (xy); a mobile mass (12), suspended above the substrate to perform, as a function of a first angular velocity (Ω) around a first axis (x) of the horizontal plane (xy), at least a first detection movement of rotation around a second axis (y) of the horizontal plane; and a first and a second stator elements (28a, 28b) integral with the substrate and arranged underneath the mobile mass to define a capacitive coupling, a capacitance value thereof is indicative of the first angular velocity (Ω). The detection structure has a single mechanical anchorage structure for anchoring both the mobile mass and the stator elements to the substrate, arranged internally with respect to the mobile mass, which is coupled to this single mechanical anchorage structure by coupling elastic elements (18) yielding to torsion around the second axis; the stator elements are integrally coupled to the single mechanical anchorage structure in an arrangement suspended above the top surface of the substrate.

Discussion in the ATmosphere

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