Physical Quantity Sensor, Inertial Measurement Unit, And Manufacturing Method

A physical quantity sensor detects a physical quantity in a third direction, and includes a fixer fixed to a substrate, a support beam having one end coupled to the fixer, and a movable body. The movable body includes a movable electrode unit and a frame unit. The fixed electrode unit includes a first fixed electrode group and a second fixed electrode group. The movable electrode unit includes a first movable electrode group and a second movable electrode group. A first recess recessed in the third direction is provided in the first movable electrode group, a second recess recessed in the third direction is provided in the second fixed electrode group, and a third recess recessed in the third direction is provided in a region of the frame unit on a second movable electrode group side.