{
  "$type": "site.standard.document",
  "description": "A physical quantity sensor detects a physical quantity in a third direction, and includes a fixer fixed to a substrate, a support beam having one end coupled to the fixer, and a movable body. The movable body includes a movable electrode unit and a frame unit. The fixed electrode unit includes a…",
  "path": "/patents/1349750",
  "publishedAt": "2023-08-24T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C21/16",
    "SEIKO EPSON CORPORATION"
  ],
  "textContent": "A physical quantity sensor detects a physical quantity in a third direction, and includes a fixer fixed to a substrate, a support beam having one end coupled to the fixer, and a movable body. The movable body includes a movable electrode unit and a frame unit. The fixed electrode unit includes a first fixed electrode group and a second fixed electrode group. The movable electrode unit includes a first movable electrode group and a second movable electrode group. A first recess recessed in the third direction is provided in the first movable electrode group, a second recess recessed in the third direction is provided in the second fixed electrode group, and a third recess recessed in the third direction is provided in a region of the frame unit on a second movable electrode group side.",
  "title": "Physical Quantity Sensor, Inertial Measurement Unit, And Manufacturing Method"
}