SYMMETRIC DIFFERENTIAL TRANSDUCER
DRIVE
March 25, 2026
A microelectromechanical device comprising a first proof mass and a second proof mass in a device plane. The first proof mass comprises a first set of rotor combs, and the first set of rotor combs comprises a first set of rotor transducer combs. The second proof mass comprises a second set of rotor combs, and the second set of rotor combs comprises a second set of rotor transducer combs. The first and second proof masses are configured to undergo anti-phase movement. The first set of rotor combs also comprises a first set of dummy rotor combs and the second set of rotor combs also comprises a second set of dummy rotor combs. The first set of rotor combs is reflection-symmetric with the second set of rotor combs.
Discussion in the ATmosphere